类型 | 品名 | 规格 | 纯度 工艺 | 工艺 |
陶瓷靶材 | Nb2O5 | 按客户需求定制 | 99.99% | 喷涂、CIP+烧结 |
SiO2 | 99.999% | 熔炼 | ||
Al2O3 | 99.99% | 烧结 | ||
HfO2 | 99.99% | 烧结 | ||
Ta2O5 | 99.99% | 烧结 | ||
合金靶材 | SiZr | 99.99% | 喷涂 | |
单质靶材 | Si | 99.999% | 拉晶生长、喷涂、烧结 | |
Nb | 99.95% | 烧结、热等静压 | ||
Ta | 99.95% | 热等静压 | ||
Hf | 99.9% | 热等静压 | ||
Zr | 99.9% | 熔炼 | ||
Al | 99.999% | 熔炼 | ||
Cr | 99.95% | 热等静压 | ||
Ti | 99.999% | 热等静压 |