









| 类型 | 品名 | 规格 | 纯度 工艺 | 工艺 |
| 陶瓷靶材 | Nb2O5 | 按客户需求定制 | 99.99% | 喷涂、CIP+烧结 |
| SiO2 | 99.999% | 熔炼 | ||
| Al2O3 | 99.99% | 烧结 | ||
| HfO2 | 99.99% | 烧结 | ||
| Ta2O5 | 99.99% | 烧结 | ||
| 合金靶材 | SiZr | 99.99% | 喷涂 | |
| 单质靶材 | Si | 99.999% | 拉晶生长、喷涂、烧结 | |
| Nb | 99.95% | 烧结、热等静压 | ||
| Ta | 99.95% | 热等静压 | ||
| Hf | 99.9% | 热等静压 | ||
| Zr | 99.9% | 熔炼 | ||
| Al | 99.999% | 熔炼 | ||
| Cr | 99.95% | 热等静压 | ||
| Ti | 99.999% | 热等静压 |