ZTO Target

APG

Ceramic Target

Zinc Tin Oxide Target(ZTO)

High Light Transmittance
Low Sheet Resistance
Dense Film Structure
High Purity

Product Introduction

Zinc Tin Oxide (ZTO) target material is a transparent conductive oxide target mainly composed of zinc oxide (ZnO) and tin oxide (SnO₂). It combines high optical transparency with excellent electrical conductivity and is considered an ideal alternative to ITO (Indium Tin Oxide). ZTO films exhibit excellent optical and electrical properties as well as chemical stability, and are widely used in thin-film deposition processes for display panels, photovoltaic devices, and touch applications.

Outstanding Properties of Zinc Tin Oxide (ZTO) Target Material

  • High Light Transmittance

    Films deposited using ZTO targets can achieve visible light transmittance exceeding 85%–90%. High optical transparency is maintained even with increased film thickness, ensuring sufficient light incidence for displays and photovoltaic devices, thereby improving brightness and enhancing photoelectric conversion efficiency. 

  • Excellent Conductivity (Low Sheet Resistance)

    By precisely controlling the ZnO/SnO₂ ratio and deposition parameters, ZTO films can achieve stable resistivity levels in the range of 10⁻³ Ω·cm. This meets the stringent low-resistance requirements of touch panels, transparent electrodes, and interconnection layers, enabling fast signal transmission and enhanced device sensitivity.

  • Dense and Stable Film Structure

    ZTO films deposited by sputtering exhibit high density and strong adhesion. They are resistant to humidity, heat, acids, alkalis, and mechanical wear, with minimal degradation of electrical and optical performance under long-term operation, ensuring high reliability.

  • Potential for Flexible Applications

    The ZTO films maintain excellent electrical and optical performance without cracking when deposited on flexible substrates, making them highly suitable for emerging applications such as bendable and rollable flexible displays and flexible photovoltaic devices.

Wide Applications of Zinc Tin Oxide (ZTO) Target Material

  1. Display Panels

    ZTO targets are used to deposit channel layers, buffer layers, and transparent electrodes in TFT-LCD, OLED, and Micro-LED display panels. Their high electron mobility and low defect density enable faster response, lower power consumption, and high brightness with strong contrast, significantly enhancing image quality and stability.

  2. Touchscreen Technology

    ZTO targets can replace conventional ITO as transparent conductive films in touch panels for smartphones, tablets, and automotive displays. Their low sheet resistance and high transmittance provide higher touch sensitivity and faster response, especially in large-area touchscreens.

  3. Photovoltaic Industry

    ZTO target materials are applied as front electrodes or buffer layers in crystalline silicon solar cells, CIGS thin-film cells, CdTe, and perovskite solar cells. Their high transmittance and low resistivity enhance light absorption while reducing resistive losses, improving photoelectric conversion efficiency and long-term stability.

  4. Flexible Electronics

    ZTO targets are suitable for flexible substrates such as PET and PI. They are used as transparent conductive films or semiconductor layers in wearable devices, flexible displays, foldable screens, and flexible sensors. Their excellent mechanical flexibility ensures stable electrical and optical performance even after repeated bending.

  5. Optical Device Manufacturing

    The ZTO targets provide thin films with tunable refractive index, high transparency, and strong adhesion in the manufacturing of optical lenses, filters, and anti-reflection coatings, . These films optimize light transmission and reflection while enhancing corrosion and wear resistance of optical components.

Technical Characteristics

  • Purity

    Purity

    99.99%

  • Relative Density

    Relative Density

    ≥98%

Application Fields

  • Display Panels

    Display Panels

  • Touchscreen Technology

    Touchscreen Technology

  • Photovoltaic Industry

    Photovoltaic Industry

  • Flexible Electronics

    Flexible Electronics

  • Optical Device Manufacturing

    Optical Device Manufacturing

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