Product Introduction
Tantalum pentoxide (Ta₂O₅) is an important functional inorganic oxide, characterized by a high dielectric constant, high refractive index, and excellent chemical stability. It is an insulator at room temperature, with a band gap of approximately 4.0–4.5 eV, and can form high-quality thin films through processes like vacuum evaporation or magnetron sputtering. Ta₂O₅ films exhibit high transparency, low absorption, and maintain stable physical and chemical properties over time, making it a key material in optical and electronic thin film manufacturing.
Outstanding Characteristics of Tantalum Pentoxide (Ta₂O₅)
High Dielectric Performance
It has a dielectric constant (20 to 25) significantly higher than that of silica which makes it suitable as a dielectric material for capacitors and high-k films.
Excellent Optical Properties
It exhibits a refractive index of approximately 2.0–2.25 (at 500 nm), which is highly tunable via deposition process optimization. Coupled with superior optical transmittance, this characteristic makes it ideal for high-performance interference coatings and advanced optical systems..
Thermal and Chemical Stability
It has exceptional thermal and chemical resilience, maintaining superior thin-film stability even when subjected to extreme temperatures and corrosive environments.
Low Absorption Loss
Low absorption and scattering properties of the films leads to high efficiency and long lifespan for optical devices.
High Purity
High-purity raw materials ensures a low-defect morphology during deposition. This optimization is critical for achieving the stringent performance uniformity and device stability required for next-generation electronic architectures.
Wide Applications of Tantalum Pentoxide (Ta₂O₅)
Optical Device Manufacturing
It is used in the preparation of anti-reflection coatings (AR coatings), optical filters, high refractive index layers, and multilayer interference films.
It plays a significant role in advanced optical systems by providing a high refractive index and excellent transparency, making it a critical material for high-performance interference filters, anti-reflective coatings, and optical waveguides in lenses, projectors, and laser systems..
Photovoltaic Industry
It is used in anti-reflection coatings for solar cells to improve light absorption and energy conversion efficiency.
It enhances the stability and weather resistance of thin-film solar modules.
Semiconductor Manufacturing
It is widely used in dielectric layers for DRAM, flash memory, and capacitors.
As a high-k dielectric film in the semiconductor industry, it meets the demands for chip miniaturization and high performance.
Technical Characteristics

Refractive index:
2-2.25(500nm)

Transparent band:
350-9000nm
Application Fields
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